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Check The Mass Air Flow Sensor Unit

WARNING: This page is about a different car, the 2015 Subaru Outback and 2015 Subaru Legacy. However, it is still accessible from the selected car via links, so may be relevant.
  1. Connect the battery positive terminal to terminal No. 3 and the battery ground terminal to terminal No. 4, and connect the circuit tester positive terminal to terminal No. 5 and the circuit tester ground terminal to terminal No. 4.
    Fig 1: Connecting Battery Positive Terminal To Terminal No. 3
    G08315415Courtesy of SUBARU OF AMERICA, INC.
  2. Check the voltage changes when air is blown to the mass air flow sensor unit in arrow direction.
    Fig 2: Checking Mass Air Flow Sensor Unit
    G08315416Courtesy of SUBARU OF AMERICA, INC.